Axcelis Technologies designs, manufactures and services ion implantation and other processing equipment used in the fabrication of semiconductor chips. The company also provides aftermarket lifecycle products and services, including used tools, spare parts, equipment upgrades, maintenance services and customer training. The company provides high energy, high current and medium current implanters for all application requirements. The company's Purion systems are all based on a common platform which enables a combination of implant purity, precision and productivity by combining a single wafer end station, with a spot beam architecture. The company's other products include curing systems, and thermal processing systems.
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